Vibrational response of a piezoelectric MEMS resonator disc metallized with alternating electrical source-Reference-Cited by-同舟云学术

Vibrational response of a piezoelectric MEMS resonator disc metallized with alternating electrical source

Published:2018 Issue: Volume: Page:
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Container-title:Proceedings of the Fourth International Conference on Engineering & MIS 2018 - ICEMIS '18
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Author:

Naciri Ismail¹,Rguiti Abdessamad.¹,Belkassmi Youssef.²,Elmaimouni Lahoucine.¹,Lefebvre Jean Etienne³,Ratolojanahary Faniry E.⁴,Krit Salahddine.⁵,Gryba Tadesz.³

Affiliation:

1. LSIE-ERMAM, Ibn Zohr University, Ouarzazate, Morocco

2. LSIE-ERMAM, LSIE-EMSIV, Ibn Zohr University, Ouarzazate, Morocco

3. Univ. Valenciennes, CNRS, Univ. Lille, YNCREA, Centrale Lille, Valenciennes, France

4. LAPAUF, Fianarantsoa University, Fianarantsoa, Madagascar

5. LSIE-EMSIV, Ibn Zohr University, Ouarzazate, Morocco

Publisher

ACM Press

Reference30 articles.

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2. M. Gurbuz, T.F. Parlak, A. Bozhurt Bechteler, An analytical design methodology for microelectromechanical (MEM)filters, Sens. Actuators A 119 38--47, 2005.

3. M. H. Tsai, Y. C. Liu, C.M. Sun, C. Wang, C. W. Cheng, W. Fang, "3-Axis CMOS-MEMS accelerometer with vertically integrated fully-differential sensing electrodes", 16th Int. Solid-State S. Actu. Micr. Conf. (TRANSDUCERS), pp. 811--814, 2011.

4. D.K. Agrawal, P. Thiruvenkatanathan, J. Yan, A.A. Seshia, Electrically coupled MEMS oscillators, in: Joint Conf. IEEE Int. Freq. Control Eur. Freq. Time Forum (FCS), pp. 1--5, 2011.

5. J.J. Miau, T.S. Leu, J.M. Yu, J.K. Tu, C.T. Wanga, V. Lebiga, D. Mironovb, A. Pak, V. Zinovyev, K.M. Chung, Mems thermal film sensors for unsteady flow measurement, Sensors and Actuators A 235, pp 1-13, 2015.

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