What is eqDRC?

Author:

Pikus Fedor G.1

Affiliation:

1. Design2Silicon Division, Mentor Graphics Corp.

Abstract

Traditional design rule checking (DRC) uses one-dimensional measurements of features and geometries to determine rule compliance. As feature sizes decrease and design complexity increases, analysis and verification become increasingly difficult. Equation-based DRC (eqDRC) extends DRC technology with a programmable modeling engine. Using eqDRC, users can define multi-dimensional feature measurements with flexible mathematical expressions that can be used to develop, calibrate, and optimize models for design analysis and verification.

Publisher

Association for Computing Machinery (ACM)

Reference12 articles.

1. Optimization of sub-100-nm designs for mask cost reduction;Balasinski A.;Journal of Microlithography, Microfabrication, and Microsystems,2004

2. The Critical Role of Design in Nanometer Process Yield;Levitt M.;Nanochip Technology Journal, Issue,2006

3. Layout impact of resolution enhancement techniques

4. Heavy rules hold back 90-nm yield -- Pressure mounts to supplant rules-based tradition with inflow design-for-yield based on process models;Wilson R.;Electronic Engineering Times, Issue,2005

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