A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning-Reference-Cited by-同舟云学术

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A Method of Predicting the Deposited Film Thickness in IC Fabrication Based on Stacking Ensemble Learning

Published:2023-12-08 Issue: Volume:7 Page:467-474
ISSN:
Container-title:Proceedings of the 2023 7th International Conference on Computer Science and Artificial Intelligence
language:
Short-container-title:

Author:

Wu Jiangchen¹^ORCID,Shi Yumeng¹^ORCID,Chen Yining¹^ORCID

Affiliation:

1. School of Micro-Nano Electronics, Zhejiang University, China

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3638584.3638630

Reference11 articles.

1. Real-time prediction of rock mass classification based on TBM operation big data and stacking technique of ensemble learning

2. Tang Y, Dong J, Guo Y, A Malicious PDF File Detection Method Based on Improved Ensemble Learning Stacking. 2022 4th International Conference on Frontiers Technology of Information and Computer (ICFTIC), 2022: 475-478.

3. Jiang J, Zhu W, Zhang C, Electrical Load Forecasting Based on Multi-model Combination by Stacking Ensemble Learning Algorithm. 2021 IEEE International Conference on Artificial Intelligence and Computer Applications (ICAICA), 2021: 739-743.

4. Li Z, D. Cai, Wang J, A Stacking Ensemble Learning Model for Mobile Traffic Prediction. 2020 IEEE/CIC International Conference on Communications in China (ICCC), 2020: 542-547.

5. O. O. Petinrin and F. Saeed. Stacked Ensemble for Bioactive Molecule Prediction. IEEE Access, 2019, 7: 153952-153957.

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