Influence of Annealing on the Morphology of the Vacuum-free Coatings NbNх, NbNx : Si
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Published:2016
Issue:2
Volume:8
Page:02019-1-02019-5
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ISSN:2077-6772
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Container-title:Journal of Nano- and Electronic Physics
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language:
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Short-container-title:J. Nano- Electron. Phys.
Author:
Rogoz V. N., ,Kuzmenko A. P.,Sobol’ O. V.,Plyushchyk A., , ,
Publisher
Sumy State University
Subject
Condensed Matter Physics,General Materials Science,Radiation