Simulation of the Process of a Micro-components Fabrication for Vacuum Electronics and X-ray Optics Using Proton Beam Writing-Reference-Cited by-同舟云学术

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Simulation of the Process of a Micro-components Fabrication for Vacuum Electronics and X-ray Optics Using Proton Beam Writing

Published:2017 Issue:6 Volume:9 Page:06010-1-06010-5
ISSN:2077-6772
Container-title:Journal of Nano- and Electronic Physics
language:
Short-container-title:J. Nano- Electron. Phys.

Author:

Ponomarev A. G., ,Lapin A. S.,Kolinko S. V.,Rebrov V. A.,Zhurba V. O.,Petrovskyi M. V.,Kolomiec V. N.,Kravchenko C. N., , , , , , ,

Publisher

Sumy State University

Subject

Condensed Matter Physics,General Materials Science,Radiation

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Special polygon for investigation of seismic insulation properties of foundations;Journal of Physics: Conference Series;2020-08-01

2. Construction of X-Ray Optics Elements with a Proton-Beam Lithography;Nanosistemi, Nanomateriali, Nanotehnologii;2018-12

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