Wafer-level Fabrication of Ball Lens by Cross-cut and Reflow of Wafer-bonded Glass on Silicon-Reference-Cited by-同舟云学术

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Wafer-level Fabrication of Ball Lens by Cross-cut and Reflow of Wafer-bonded Glass on Silicon

Published:2010-06-25 Issue:2 Volume:14 Page:163-169
ISSN:1226-4776
Container-title:Journal of the Optical Society of Korea
language:en
Short-container-title:Journal of the Optical Society of Korea

Author:

Lee Dong-Whan,Oh Jin-Kyung,Choi Jun-Seok,Lee Hyung-Jong,Chung Woo-Nam

Publisher

Korean Journal of Optics and Photonics

Subject

Atomic and Molecular Physics, and Optics

Link

http://ocean.kisti.re.kr/downfile/crosscheck/osk/JAKO201018037269627.pdf

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of Micro-Polymer Lenses With Spacers Using Low-Cost Wafer-Level Glass-Silicon Molds;IEEE Transactions on Components, Packaging and Manufacturing Technology;2013-12

2. Monolithically integrated glass microlens scanner using a thermal reflow process;Journal of Micromechanics and Microengineering;2013-04-29

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