Synthesis of α-Al 2 O 3 thin films using reactive high-power impulse magnetron sputtering-Reference-Cited by-同舟云学术

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Synthesis of α-Al 2 O 3 thin films using reactive high-power impulse magnetron sputtering

Published:2008-04-23 Issue:3 Volume:82 Page:36002
ISSN:0295-5075
Container-title:EPL (Europhysics Letters)
language:
Short-container-title:Europhys. Lett.

Author:

Wallin E.,Selinder T. I.,Elfwing M.,Helmersson U.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

https://iopscience.iop.org/article/10.1209/0295-5075/82/36002/pdf

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