1. 1) W.P. Eaton, F. Bitsie, J.H. Smith and D.W. Plummer : International Conference on Modeling and Simulation of Microsystems (1999).
2. 2) P. Eswaran and S. Malarvizhi : Int. J. Appl. Phys. Math. 2, 14 (2012).
3. 3) H. Miyashita, H. Onuma, Y. Ide, I. Mochizuki and N. Saito : J. Vac. Soc. Jpn. 59, 255 (2016). (in Japanese).
4. 4) “Handbook of Vacuum Technology”, ed. by K. Jousten (WILEY-VCH Verlag GmbH & Co. KGaA, 2008) p. 567.