International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (1) Background of the Standardization and Definition of Sensitivity-Reference-Cited by-同舟云学术

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International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (1) Background of the Standardization and Definition of Sensitivity

Published:2019-05-10 Issue:5 Volume:62 Page:276-281
ISSN:2433-5835
Container-title:Vacuum and Surface Science
language:en
Short-container-title:Vac. Surf. Sci.

Author:

YOSHIDA Hajime¹

Affiliation:

1. Pressure and Vacuum Standard group, Research Institute for Engineering Measurement, NMIJ, AIST

Publisher

Surface Science Society Japan

Link

https://www.jstage.jst.go.jp/article/vss/62/5/62_20180339/_pdf

Reference13 articles.

1. 1) ISO 14291:2012 Vacuum gauges — Definitions and specifications for quadrupole mass spectrometer (ISO, Ganeva, 2012).

2. 2) ISO/TS 20175:2018 Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement (ISO, Ganeva, 2018).

3. 5) M. Hirata : J. Vac. Soc. Jpn. 50, 507 (2007). (in Japanese).

4. 6) ISO/TS 20177:2018 Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates (ISO, Ganeva, 2018).

5. 8) K.K. Murray et al. : Pure Appl. Chem. 85, 1515 (2013).

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