International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (2) Definition of Parameters to Specify the Characteristics and the Evaluation Method-Reference-Cited by-同舟云学术

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International Standardization on the Definition and Characterization of Quadrupole Mass Spectrometer (2) Definition of Parameters to Specify the Characteristics and the Evaluation Method

Published:2019-05-10 Issue:5 Volume:62 Page:282-287
ISSN:2433-5835
Container-title:Vacuum and Surface Science
language:en
Short-container-title:Vac. Surf. Sci.

Author:

YOSHIDA Hajime¹

Affiliation:

1. Pressure and Vacuum Standard group, Research Institute for Engineering Measurement, NMIJ, AIST

Publisher

Surface Science Society Japan

Link

https://www.jstage.jst.go.jp/article/vss/62/5/62_20180340/_pdf

Reference18 articles.

1. 1) ISO 14291:2012 Vacuum gauges — Definitions and specifications for quadrupole mass spectrometer (ISO, Ganeva, 2012).

2. 2) ISO/TS 20175:2018 Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement (ISO, Ganeva, 2012).

3. 3) H. Yoshida : Vac. Surf. Sci., to be published. (in Japanese).

4. 5) H. Yoshida, K. Arai, H. Akimichi and M. Hirata : Vacuum 85, 78 (2010).

5. 6) W.G. Bley : Vacuum 38, 103 (1988).

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