Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation-Reference-Cited by-同舟云学术

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Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation

Published:2018 Issue:4 Volume:61 Page:227-235
ISSN:2433-5835
Container-title:Vacuum and Surface Science
language:en
Short-container-title:Vac. Surf. Sci.

Author:

MIYAZAWA Tetsuya¹,TOBISHIMA Kensuke²,KATO Hiroo²,KURIHARA Masashi³,OHNO Shinya³,KIKUCHI Takashi⁴,MASE Kazuhiko¹⁴

Affiliation:

1. SOKENDAI

2. Hirosaki University

3. Yokohama National University

4. KEK

Publisher

Surface Science Society Japan

Link

https://www.jstage.jst.go.jp/article/vss/61/4/61_20180075/_pdf

Reference21 articles.

1. 1) H.C. Hseuh and C. Lanni : J. Vac. Sci. Technol., A 1, 1283 (1983).

2. 2) C. Benvenuti and P. Chiggiato : Vacuum 44, 511 (1993).

3. 3) C. Benvenuti and P. Chiggiato : J. Vac. Sci. Technol., A 14, 3278 (1996).

4. 4) C. Benvenuti, P. Chiggiato, F. Cicoira and Y. L’Aminot : J. Vac. Sci. Technol., A 16, 148 (1998).

5. 5) C. Benvenuti, P. Chiggiato, F. Cicoira and V. Ruzinov : Vacuum 50, 57 (1998).

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