Affiliation:
1. Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
Surface Science Society Japan
Subject
General Earth and Planetary Sciences,General Engineering,General Environmental Science
Reference23 articles.
1. 3) A. Han, K.W. Oh, S. Bhansali, H.T. Henderson and C.H. Ahn: Proc. MEMS 2000 (IEEE, 2000) p. 414.
2. 4) F. Niklaus, P. Enoksson, E. Kälvesten and G Stemme: J. Micromech. Microeng. 11, 100 (2001).
3. 5) R. Knechtel: Proc. Symp. Design, Test, Integration, Packaging MEME/MOEMS 2004 (TIMA Labs, 2004) p. 77.
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