Development of an Ultra Soft X-ray EPMA Equipped with a Grating Monochrometer and a Poly-capillary-Reference-Cited by-同舟云学术

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Development of an Ultra Soft X-ray EPMA Equipped with a Grating Monochrometer and a Poly-capillary

Published:2006 Issue:9 Volume:27 Page:540-545
ISSN:0388-5321
Container-title:Hyomen Kagaku
language:en
Short-container-title:Journal of The Surface Science Society of Japan

Author:

KIMURA Takashi¹,FUKUSHIMA Sei¹,TANUMA Shigeo¹,TAZAWA Toyohiko²,TSUKAMOTO Kazunori²

Affiliation:

1. Materials Analysis Station, National Institute for Materials Science

2. Electron Optics Division, JEOL Ltd.

Publisher

Surface Science Society Japan

Subject

General Earth and Planetary Sciences,General Engineering,General Environmental Science

Link

http://www.jstage.jst.go.jp/article/jsssj/27/9/27_9_540/_pdf

Reference12 articles.

1. Penetration and energy-loss theory of electrons in solid targets

2. 2) “SURFACE ANALYSIS by Auger and X-ray Photoelectron Spectroscopy”, ed. by D. Briggs and J.T. Grant (IM Publications, 2003).

3. 3) J. Nordgren and J. Guo: J. Electron Spectrosc. Relat. Phenomena. 110/111, 1 (2000).

4. An ultrathin buried Si layer in GaAs studied by soft X-ray emission spectroscopy and surface X-ray diffraction: theory and experiment

5. 5) H.W.B. Skinner: Trans. Roy. Soc. A 299, 95 (1940).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of ultra light elements with newly developed ultra-soft X-ray spectrometer for electron probe microanalysis;Microchimica Acta;2008-05-21

2. 10.4139/sfj.59.838;Journal of The Surface Finishing Society of Japan;2008

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