Contribution in Semiconductor Industry of Surface Science-Reference-Cited by-同舟云学术

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Contribution in Semiconductor Industry of Surface Science

Published:2011 Issue:5 Volume:32 Page:246-253
ISSN:0388-5321
Container-title:Hyomen Kagaku
language:en
Short-container-title:Journal of The Surface Science Society of Japan

Author:

NAKAMURA Makoto¹

Affiliation:

1. Device Integration Technology Lab. Device & Materials Laboratories, Fujitsu Laboratories Ltd.

Publisher

Surface Science Society Japan

Subject

General Earth and Planetary Sciences,General Engineering,General Environmental Science

Link

http://www.jstage.jst.go.jp/article/jsssj/32/5/32_5_246/_pdf

Reference71 articles.

1. 1) U.S. Patent 2524035.

2. 2) U.S. Patent 3138743.

3. 3) G.E. Moore: Electronics, 38 (1965).

4. 4) Inter. Tech. Roadmap for Semiconductors 2009 Edition.

5. 5) H. Wakabayashi, S. Yamagami, N. Ikezawa, A. Ogura, M. Norihiro, K. Aritani, Y. Ochiai, K. Takeuchi, T. Yamamoto and T. Mogami: Tech. Dig. Inter. Electron Device Meeting, 989 (2003).

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Advanced Microbeam Analysis for Characterizing Structure of Surface and Interface for Various Material;Journal of the Surface Finishing Society of Japan;2015

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