Oxidation Mechanism of Silicon Surface. Observation of Pattern-dependent Oxidation of Silicon Nanostructures.
Author:
Affiliation:
1. NTT Basic Research Laboratories, NTT Corporation
2. NTT Advanced Technology Corporation
Publisher
Surface Science Society Japan
Subject
General Earth and Planetary Sciences,General Engineering,General Environmental Science
Link
http://www.jstage.jst.go.jp/article/jsssj/23/9/23_9_573/_pdf
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4. Self-limiting and pattern dependent oxidation of silicon dots fabricated on silicon-on-insulator material
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1. Strain Distribution around SiO2/Si Interface in Si Nanowires: A Molecular Dynamics Study;Japanese Journal of Applied Physics;2007-05-17
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