Spatial Analytical Surface Structure Mapping for Three-dimensional Micro-shaped Si by Micro-beam Reflection High-energy Electron Diffraction

Author:

Nakatsuka Sohei1,Imaizumi Taishi1,Abukawa Tadashi12,Hattori Azusa N.3,Tanaka Hidekazu3,Hattori Ken4

Affiliation:

1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University

2. International Center of Synchrotron Radiation Innovation Smart, Tohoku University

3. The Institute of Scientific and Industrial Research, Osaka University

4. Graduate School of Science and Technology, Nara Institute of Science and Technology

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Reference26 articles.

1. [1] N. Lindert, L. Chang, Y.-K. Choi, E. H. Anderson, W.-C. Lee, T.-J. King, J. Bokor, and C. Hu, IEEE Electron Device Lett. 22, 487 (2001).

2. [2] C. C. Wu, D. W. Lin, A. Keshavarzi, C. H. Huang, C. T. Chan, C. H. Tseng, C. L. Chen, C. Y. Hsieh, K. Y. Wong, M. L. Cheng, T. H. Li, Y. C. Lin, L. Y. Yang, C. P. Lin, C. S. Hou, H. C. Lin, J. L. Yang, K. F. Yu, M. J. Chen, T. H. Hsieh, Y. C. Peng, C. H. Chou, C. J. Lee, C. W. Huang, C. Y. Lu, F. K. Yang, H. K. Chen, L. W. Weng, P. C. Yen, S. H. Wang, S. W. Chang, S. W. Chuang, T. C. Gan, T. L. Wu, T. Y. Lee, W. S. Huang, Y. J. Huang, Y. W. Tseng, C. M. Wu, E. Ou-Yang, K. Y. Hsu, L. T. Lin, S. B. Wang, T. M. Kwok, C. C. Su, C. H. Tsai, M. J. Huang, H. M. Lin, A. S. Chang, S. H. Liao, L. S. Chen, J. H. Chen, P. S. Lim, X. F. Yu, S. Y. Ku, Y. B. Lee, P. C. Hsieh, P. W. Wang, Y. H. Chiu, S. S. Lin, H. J. Tao, M. Cao, and Y. J. Mii, 2010 International Electron Devices Meeting (San Francisco, 2010) p. 27.1.1.

3. [3] R. Kuroda, Y. Nakao, A. Teramoto, S. Sugawa, and T. Ohmi, Jpn J. Appl. Phys. 53, 04EC04 (2014).

4. [4] A. N. Hattori, K. Hattori, S. Takemoto, H. Daimon, and H. Tanaka, Surf. Sci. 644, 86 (2016).

5. [5] G. Wulff, Z. Kristallogr. Cryst. Mater. 34, 449 (1901).

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