In-Situ, Real Time Observation of Operating Condition of Multi Emitters in Pulse Mode

Author:

Murata Hidekazu1,Sakai Kentaro1,Tsubaki Daisuke1,Shimoyama Hiroshi1,Sakemura Kazuto2,Negishi Nobuyasu2,Watanabe Atsushi2

Affiliation:

1. Faculty of Science & Technology, Meijo University, Japan

2. Corporate R&D Laboratories, Pioneer Corporation, Japan

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Reference8 articles.

1. [1] N. Negishi, T. Nakada, K. Sakemura, Y. Okuda, H. Satoh, A. Watanabe, T. Yoshikawa, K. Ogasawara, and N. Koshida, J. Vac. Sci. Technol. B 23, 682 (2005).

2. [2] H. Makishima, S. Miyano, H. Imura, J. Matsuoka, H. Takemura, and A. Okamoto, Appl. Surf. Sci. 146, 230 (1999).

3. [3] T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, and B. W. Hussey, J. Vac. Sci. Technol. B 14, 3774 (1996).

4. [4] T. R. Groves and R. A. Kendall, J. Vac. Sci. Technol. B 16, 3168 (1998).

5. [5] H. Murata, T. Kimura, Y. Nishimura, H. Shimoyama, A. Mogami, Y. Sakai, M. Kudo, M. Kato, K. Betsui, and K. Inoue, Technical Digest of the 17th Int. Vacuum Nanoelectronics Conf. (Cambridge, MA), 188 (2004).

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