Superhydrophilization of Si Surface by Atmospheric-Pressure Plasma Jet Irradiation: Analysis by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)-Reference-Cited by-同舟云学术

Superhydrophilization of Si Surface by Atmospheric-Pressure Plasma Jet Irradiation: Analysis by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Published:2013 Issue:0 Volume:11 Page:36-39
ISSN:1348-0391
Container-title:e-Journal of Surface Science and Nanotechnology
language:en
Short-container-title:e-J. Surf. Sci. Nanotechnol.

Author:

Kuwahata Hiroshi¹,Haraki Takeshi²,Mikami Ikko³

Affiliation:

1. Department of Electrical and Electronics Engineering, School of Engineering, Tokai University, Japan

2. Technology Joint Management Office, Tokai University, Japan

3. Department of Chemistry, School of Science, Tokai University, Japan

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

https://www.jstage.jst.go.jp/article/ejssnt/11/0/11_36/_pdf

Reference20 articles.

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3. [3] M. Soma, T. Ueda, K. Yamazaki, Y. Sawada, Y. Nakazono, and Y. Inoue, Matsushita Electric Works. Ltd., Report, Nov. 61 (2002) (in Japanese).

4. [4] Z. Fang, Y. Qiu, and E. Kuffel, J. Phys. D: Appl. Phys. 37, 2261 (2004).

5. [5] H. Kuwahata and R. Ohyama, Hyomen Kagaku 30, 174 (2009) (in Japanese).

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