Comparison of SEM-EDS, Micro-XRF and Confocal Micro-XRF for Electric Device Analysis-Reference-Cited by-同舟云学术

Comparison of SEM-EDS, Micro-XRF and Confocal Micro-XRF for Electric Device Analysis

Author:

Komatani Shintaro¹²,Aoyama Tomoki³,Nakazawa Takashi⁴,Tsuji Kouichi¹

Affiliation:

1. Department of Applied Chemistry and Bioengineering, Graduate School of Engineering, University of Osaka City, Japan

2. Department of Global Strategy Headquarters, HORIBA TECHNO SERVICE CO., Ltd., Japan

3. Department of Application R&D Center, HORIBA, Ltd., Japan

4. Department of Applied Chemistry Faculty of Science and Engineering, Chuo University, Japan

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Link

Reference14 articles.

1. [1] K. Tsuji, K. Nakano, Y. Takahashi, K. Hayashi, and C.-U. Ro, Anal. Chem. 84, 636 (2012).

5. [5] B. M. Patterson, J. Campbell, and G. J. Havrilla, American Laboratory 38, 15 (2006).

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