Evaluation of Metal Surface Contamination in Portable Ultrahigh-vacuum Sample Transfer Vessel by Photoelectron Spectroscopy
Author:
Affiliation:
1. Kyushu Synchrotron Light Research Center
2. Advanced-ICT Research Institute, National Institute of Information and Communications Technology
Publisher
Surface Science Society Japan
Link
https://www.jstage.jst.go.jp/article/vss/62/9/62_20180414/_pdf
Reference8 articles.
1. 1) E. Kobayashi, J. Meikaku, T. Okajima and H. Setoyama : Japanese Patent No. 5234994. (in Japanese).
2. 2) E. Kobayashi, J. Meikaku, H. Setoyama and T. Okajima : J. Surf. Anal. 19, 2 (2012). (in Japanese).
3. 3) S. Tanaka : Japanese Patent No. 4831548. (in Japanese).
4. 4) E. Kobayashi, S. Tanaka and T. Okajima : J. Vac. Soc. Jpn. 59, 192 (2016). (in Japanese).
5. 5) E. Kobayashi, S. Tanaka and T. Okajima : J. Vac. Soc. Jpn. 60, 139 (2017). (in Japanese).
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