Influence of Scattering and Ionization on RF Impedance in Glow Discharge Sheaths-Reference-Cited by-同舟云学术

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Influence of Scattering and Ionization on RF Impedance in Glow Discharge Sheaths

Published:1979-01 Issue:1 Volume:23 Page:16-23
ISSN:0018-8646
Container-title:IBM Journal of Research and Development
language:
Short-container-title:IBM J. Res. & Dev.

Author:

Pennebaker W. B.

Publisher

IBM

Subject

General Computer Science

Link

http://xplorestaging.ieee.org/ielx5/5288520/5390875/05390878.pdf?arnumber=5390878

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