Author:
Rubloff G. W.,Bordonaro D. T.
Cited by
13 articles.
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1. Defects, Contaminants, and Yield;Reliability and Failure of Electronic Materials and Devices;2015
2. Process Equipment;Introduction to Microfabrication;2010-11-09
3. Cleanrooms;Introduction to Microfabrication;2010-11-09
4. Rapid Thermal Processing;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
5. A wafer-handling interface under processing ambient conditions for a single-wafer cluster tool;IEEE Transactions on Semiconductor Manufacturing;1998