Exposure to Volatile Organic Compounds and Possibility of Exposure to By-product Volatile Organic Compounds in Photolithography Processes in Semiconductor Manufacturing Factories

Author:

Park Seung-Hyun,Shin Jung-Ah,Park Hyun-Hee,Yi Gwang Yong,Chung Kwang-Jae,Park Hae-Dong,Kim Kab-Bae,Lee In-Seop

Publisher

Elsevier BV

Subject

Chemical Health and Safety,Public Health, Environmental and Occupational Health,Safety Research,Safety, Risk, Reliability and Quality

Reference21 articles.

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3. Personal fluoride and solvent exposures, and their determinants, in semiconductor manufacturing;Woskie;Appl Occup Environ Hyg,2000

4. Semiconductors [Internet],2005

5. A simulation model to characterize the photolithography process of a semiconductor wafer fabrication;Arisha;J Mater Process Tech,2004

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