Construction of a power electronic source for cold plasma generation

Abstract

This paper presents the development of a high voltage and high-frequency power electronics source, for plasma generation, at atmospheric pressure and vacuum, using helium and air as working gases. The source design consists of an inductive (L) full bridge series resonant inverter at high frequency, where the control implemented allows varying duty cycle and frequency. Plasma generation is made by high voltage with the power signal applied on two electrodes, which provides a strong electric field that excites, and thus, ionize helium particles or air particles. The power electronic source operation was tested in different plasma reactor configurations (dielectric barrier discharge, double dielectric barrier discharge, and jet type discharge). The developed power electronics source shows a correct performance and generate a strong electric field to achieve the plasma discharges desired.