LTCC-based Fluidic Components for Chemical Applications

Abstract

The material properties of low-temperature co-fired ceramics (LTCCs) enable new application areas beyond the use as basic material for high-density circuits. Therefore, LTCCs are increasingly used for microfluidic applications. A modular LTCC-based microreaction system is presented in this article. One focal point of our work was the development of a connecting system for these ceramic fluidic modules. Importance was attached to solid mechanical design, good temperature resistance of fluidic and electrical connections, and minimized dead volume. In contrast to LTCC-based substrates with only electrical circuits, integration of fluidic components makes great demands, especially on the mechanical processing of the green tapes. Mechanical processing of LTCC was made by laser cutting or laser ablation. Single modules and a complete system are the subject of chemical characterization. LTCC-based mixer structures are characterized using the Villermaux–Dushman method. The functionality of the whole system is shown with an example reaction.