Embedded Ferrite LTCC Inductors

Abstract

This paper presents for the first time one realization of simple planar inductor realized inside the stack of ferrite LTCC (Low Temperature Co-fired Ceramic) tapes. Presented inductor is one layer square spiral fabricated in the LTCC technology. In order to point out benefits of implementation of ferrite material on inductor inductance, the same inductor geometry was fabricated between two dielectric LTCC tapes. Commercially available LTCC material (both ferrite and dielectric) were implemented for the realization of proposed inductors. Designed structures were characterized and obtained experimental results show that even implementation of a very thin layer of ferrite material around inductor lines drastically increases its inductance. For the same inductor design that occupies the same chip area the inductance enhancement over 11 times is achieved. In addition this enhancement is followed with maintenance of good performance of the inductor.