Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N+(1018cm-2)-Reference-Cited by-同舟云学术

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Structure and Physicomechanical Properties of Nanostructured (TiHfZrNbVTa)N Coatings after Implantation of High Fluences of N+(1018cm-2)

Published:2017-08 Issue:2 Volume:132 Page:217-221
ISSN:0587-4246
Container-title:Acta Physica Polonica A
language:en
Short-container-title:Acta Phys. Pol. A

Author:

Pogrebnjak A.D.¹²,Bondar O.V.¹,Borba S.O.¹,Piotrowska K.³,Boiko O.²

Affiliation:

1. Sumy State University, Department of Nanoelectronics, R.-Korsakova 2, 40007, Sumy, Ukraine

2. Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, 20-618 Lublin, Poland

3. Institute of Technological Systems of Information, Lublin University of Technology, 20-618 Lublin, Poland

Publisher

Institute of Physics, Polish Academy of Sciences

Subject

General Physics and Astronomy

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