AlGaN Composition Correction under Variable Ammonia and Pressure Conditions in MOVPE Reactor-Reference-Cited by-同舟云学术

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AlGaN Composition Correction under Variable Ammonia and Pressure Conditions in MOVPE Reactor

Published:2022-02 Issue:2 Volume:141 Page:105-109
ISSN:1898-794X
Container-title:Acta Physica Polonica A
language:
Short-container-title:Acta Phys. Pol. A

Author:

Moszak K.¹²,Olszewski W.¹³,Pucicki D.¹⁴,Serafińczuk J.¹³,Startek K.¹²,Hommel D.¹⁴

Affiliation:

1. Łukasiewicz Research Network -PORT Polish Center for Technology Development, Stabłowicka 147, 54-066 Wrocław, Poland

2. Institute of Low Temperature and Structure Research, Polish Academy of Sciences W. Trzebiatowski Institute, Okólna 2, 50-422 Wrocław, Poland

3. Institute of Experimental Physics, University of Wrocław, Maksa Borna 9, 50-204 Wrocław, Poland

4. Department of Nanometrology, Wrocław University of Science and Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Publisher

Institute of Physics, Polish Academy of Sciences

Subject

General Physics and Astronomy

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