Study of the Influence of the Annealing Temperature on the Properties of SiC-SiO2 Thin Films
Author:
Affiliation:
1. CRTSE, Division CMSI, 02 Bd Frantz Fanon, B.P. 140, Alger 7 Merveilles, Algiers, Algeria
Publisher
Institute of Physics, Polish Academy of Sciences
Subject
General Physics and Astronomy
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