RuO2thin films deposited by spin coating on silicon substrates: pH-dependence of the microstructure and catalytic properties
Author:
Publisher
Wiley
Subject
Histology,Pathology and Forensic Medicine
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1365-2818.2009.03236.x/fullpdf
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3. Ru and RuO2 gate electrodes for advanced CMOS technology;Fröhlich;Mater. Sci. Eng.,2004
4. Material characteristics and electrical property of reactively sputtered RuO2 thin films;Huang;Thin Solid Films,2001
5. RuO2-SiO2 composite thin films with wide resistivity;Jalenkovic;Microelectron. Eng.,2004
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