1. Center of Ultra‐Precision Optoelectronic Instrument Engineering Harbin Institute of Technology Harbin China
2. Key Lab of Ultra‐Precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology Harbin China
3. Univ Lyon, INSA‐Lyon, Université Claude Bernard Lyon 1 CNRS, Inserm, CREATIS UMR 5220 U1294 Lyon France