Development of Reference Standards for the Calibration of Optical Systems Used in the Measurement of Microcomponents
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1475-1305.2008.00603.x/fullpdf
Reference16 articles.
1. MEMS: A Practical Guide to Design, Analysis, and Applications
2. Optical Inspection of Microsystems
3. Optical Microsystems Metrology I;Osten;Optics and Lasers in Engineering,2001
4. Optical Microsystems Metrology II;Osten;Optics and Lasers in Engineering,2001
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