Experimental Determination of the Q-factors of Microcantilevers Coated With Thin Metal Films
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1475-1305.2009.00628.x/fullpdf
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3. Modeling and optimal design of piezoelectric cantilever microactuators;DeVoe;J. Microelectromech. Syst.,1997
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