Thermal Properties Measurement of Micro-electromechanical System Sensors by Digital Moiré Method
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1475-1305.2005.00226.x/fullpdf
Reference15 articles.
1. Thermal challenges in MEMS applications: phase change phenomena and thermal bonding processes;Lin;Microelectron. J.,2003
2. Analysis and design of polysilicon thermal flexure actuator;Huang;J. Micromech. Microeng.,1999
3. Microsensors, microelectro mechanical systems (MEMS), and electronics for smart structures and systems;Varadan;Smart Mater. Struct.,2000
4. Logical moiré and application;Asundi;Exp. Mech.,1991
5. Phase shifting moiré method with an atomic force microscope;Xie;Appl. Opt.,2001
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