1. Advanced materials and powders - Aluminum nitride (AlN);Mussler;Am Ceram Soc Bull,2000
2. Aluminum nitride: a versatile but challenging material;Sheppard;Am Ceram Soc Bull,1990
3. Kellerman D Hannemann RJ Czerepak SJ Simcoe RJ Integral heat sink semiconductor package, US Patent no - US5158912
4. Enck RC Harris JH Youngman RA Nemecek TS Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck, in US Patent No. 6,017, 485, January 25, 2000
5. Komino M Amano H Endo S Fujisato T Sasaki Y Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor, US Patent No. US7337745, 2008