Stability and Microstructure of Indium Tin Oxynitride Thin Films
Author:
Affiliation:
1. Department of Chemical Engineering; University of Rhode Island; Kingston; RI; 02881
2. Air Force Research Laboratory; Hanscom Air Force Base; Bedford; MA; 01731
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2011.04845.x/fullpdf
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