Processing Optimization of Lead Magnesium Niobate-Lead Titanate Thin Films for Piezoelectric MEMS Application
Author:
Affiliation:
1. G.W. Woodruff School of Mechanical Engineering; Georgia Institute of Technology; Atlanta; Georgia; 30332
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2011.05042.x/fullpdf
Reference40 articles.
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3. High Strain, {001} Textured 0.675Pb(Mg1/3Nb2/3)O3-0.325PbTiO3 Ceramics: Templated Grain Growth and Piezoelectric Properties;Kwon;J. Am. Ceram. Soc.,2005
4. Ultrahigh Strain and Piezoelectric Behavior in Relaxor Based Ferroelectric Single Crystals;Park;J. Appl. Phys.,1997
5. Dielectric and Piezoelectric Properties of Sol-Gel Derived Lead Magnesium Niobium Titanate Films with Different Textures;Park;J. Appl. Phys.,2001
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