Preparation of Sputtered (Bax,Sr1-x)TiO3 Thin Films Directly on Copper
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1551-2916.2005.00488.x/fullpdf
Reference16 articles.
1. Trends in the development of ULSI DRAM capacitors
2. BaSrTiO/sub 3/ thin films for integrated high frequency capacitors
3. Synthesis and characterization of (BaxSr1−x)Ti1+yO3+zthin films and integration into microwave varactors and phase shifters
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