Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Author:

Riedel Ralf,Toma Liviu,Janssen Enrico,Nuffer Jürgen,Melz Tobias,Hanselka Holger

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Reference20 articles.

1. 1 R. Riedel , G. Mera , R. Hauser , and A. Klonczynski , “Silicon-Based Polymer-Derived Ceramics: Synthesis Properties and Applications-A Review,” J. Ceram. Soc. Jpn., 114 [6] 425-44 (2006).

2. 2 L. Zhang , Y. Wang , Y. Wei , W. Xu , D. Fang , L. Zhai , K.-C. Lin , and L. An , “A Silicon Carbonitride Ceramic with Anomalously High Piezoresistivity,” J. Am. Ceram. Soc., 91 [4] 1346-9 (2008).

3. 3 Y. Wang , L. Zhang , Y. Fan , D. Jiang , and L. An , “Stress-Dependent Piezoresistivity of Tunneling-Percolation Systems,” J. Mater. Sci., 44, 2814-9 (2009).

4. 4 R. Riedel , L. M. Ruwisch , L. An , and R. Raj , “Amorphous Silicoboron Carbonitride Ceramic with Very High Viscosity at Temperatures above 1500°C,” J. Am. Ceram. Soc., 81 [12] 3341-4 (1998).

5. 5 W. P. Mason and R. N. Thurston , “Use of Piezoresistive Materials in the Measurement of Displacement, Force and Torque,” J. Acoust. Soc. Am., 29, 1096-101 (1957).

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