Additively patterned ferroelectric thin films with vertical sidewalls-Reference-Cited by-同舟云学术

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Additively patterned ferroelectric thin films with vertical sidewalls

Published:2016-11-02 Issue:3 Volume:100 Page:848-858
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

Welsh Aaron J.¹,Dezest Denis²,Nicu Liviu²,Trolier-McKinstry Susan¹

Affiliation:

1. Materials Science and Engineering Department and Materials Research Institute; The Pennsylvania State University; University Park Pennsylvania

2. Laboratoire d'Analyse et d'Architecture des Systemes-Le Centre National de la Recherche Scientifique; University de Toulouse; Toulouse France

Funder

National Security Science and Engineering Faculty Fellowship (NSSEFF)

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.14566/fullpdf

Reference24 articles.

1. A novel wet etching process of Pb(Zr, Ti)O3 thin films for applications in microelectromechanical system;Zheng;Jpn J Appl Phys,2004

2. Thin-film PZT lateral actuator with extended stroke;Oldham;J Microelectromech Syst,2008

3. Design of MEMS PZT circular diaphragm actuators to generate large deflections;Hong;J Microelectromech Syst,2006

4. Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films;Xu;J Appl Phys,2001

5. Etching effects on ferroelectric capacitors with multilayered electrodes;Chung;Jpn J Appl Phys,1997

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