Bismuth Zinc Niobate Thin Film Multilayer Capacitors with Cu Electrodes Fabricated at Low Temperature by RF Magnetron Sputtering-Reference-Cited by-同舟云学术

Bismuth Zinc Niobate Thin Film Multilayer Capacitors with Cu Electrodes Fabricated at Low Temperature by RF Magnetron Sputtering

Published:2016-03-02 Issue:5 Volume:99 Page:1676-1680
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J. Am. Ceram. Soc.

Author:

He Fan¹,Ren Wei¹,Khan Muhammad Saeed¹,Shi Peng¹

Affiliation:

1. Electronic Materials Research Laboratory; Key Laboratory of the Ministry of Education & International Center for Dielectric Research; Xi'an Jiaotong University; Xi'an 710049 China

Funder

National Natural Science Foundation of China

“111 Project” of China

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/jace.14161/fullpdf

Reference34 articles.

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3. Multilayer Thin and Ultrathin Film Capacitors Fabricated by Chemical Solution Deposition;Brennecka;J. Mater. Res.,2008

4. Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components;Maria;J. Am. Ceram. Soc.,2001

5. High-κ Gate Dielectrics: Current Status and Materials Properties Considerations;Wilk;J. Appl. Phys.,2001

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