ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining
Author:
Affiliation:
1. Department of Materials Science and Engineering Tokyo Institute of Technology Tokyo Japan
2. Galatea Laboratory IMT/STI Ecole Polytechnique Fédérale de Lausanne (EPFL) Neuchâtel Switzerland
Publisher
Wiley
Subject
General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1111/ijag.15857
Reference35 articles.
1. Fabrication of high‐aspect ratio, micro‐fluidic channels and tunnels using femtosecond laser pulses and chemical etching;Bellouard Y;Opt Express,2004
2. Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
3. Three-Dimensional Laser Printing of Macro-Scale Glass Objects at a Micro-Scale Resolution
4. Femtosecond laser-assisted three-dimensional microfabrication in silica
5. MEMS vibrational energy harvesters;Toshiyoshi H;Sci Technol Adv Mater,2019
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