Structural investigation of Al 2 O 3 coatings by PECVD with a high deposition rate-Reference-Cited by-同舟云学术

Structural investigation of Al 2 O 3 coatings by PECVD with a high deposition rate

Author:

Zhang Song¹^ORCID,Zheng Long¹,Wei Geng¹,Guo Litong¹,Li Jun²,Tu Rong¹,Zhang Lianmeng¹,Goto Takashi¹³,Ohmori Hitoshi¹⁴

Affiliation:

1. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing Wuhan University of Technology Wuhan China

2. National Key Laboratory for Shock Wave and Detonation Physics Institute of Fluid Physics Mianyang China

3. Institute for Materials Research Tohoku University Aoba‐ku, Sendai Japan

4. Institute of Physical and Chemical Research Wako, Saitama Japan

Funder

National Natural Science Foundation of China

Natural Science Foundation of Hubei Province

State Key Laboratory of Advanced Technology for Materials Synthesis and Processing

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Link

Reference34 articles.

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