Feasibility Study of a Thick-Film PZT Resonant Pressure Sensor Made on a PreFired 3D LTCC Structure

Author:

Zarnik Marina Santo,Belavič Darko,Maček Srečko,Holc Janez

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Reference14 articles.

1. Using LTCC for Microsystems;Thelemann,2002

2. LTCC in Microsystem Application;Golonka,2002

3. 3.  U. Partsch , D. Arndt , U. Keitel , and P. Otschik , “Piezoelectric Pressure Sensors in LTCC-Technology,”Proceedings of European Microelectronic and Packaging Conference, Friderichshafen, Germany, pp. 331-335, 2003.

4. 4.  S. Gebhardt , L. Seffner , F. Schlenkrich , and A. Schonecker , “PZT Thick Films for Microsystems Applications,”Proceedings of European Microelectronic and Packaging Symposium EMPS 2006, Terme Čatež, Slovenia, pp. 9-13, 2006.

5. Low Temperature Firing of PZT Thick Films Prepared by Screen Printing Method;Lee,2002

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