Fabrication of SiC Ceramics with Micropatterns from a Facile Replication Process-Reference-Cited by-同舟云学术

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Fabrication of SiC Ceramics with Micropatterns from a Facile Replication Process

Published:2012-01-17 Issue:2 Volume:9 Page:304-312
ISSN:1546-542X
Container-title:International Journal of Applied Ceramic Technology
language:en
Short-container-title:

Author:

Zhang Kuibao¹,Fu Zhengyi¹,Nakayama Tadachika²,Okumura Masatoshi²,Niihara Koichi²

Affiliation:

1. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing; Wuhan University of Technology; Wuhan; 430070; China

2. Extreme Energy-Density Research Institute; Nagaoka University of Technology; 1603-1 Nagaoka; Niigata; 940-2188; Japan

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1744-7402.2011.02731.x/fullpdf

Reference42 articles.

1. Microlithography: An Overview;Brambley;Adv. Mater. Opt. Electron.,1994

2. Lab-on-a-Chip: Applications in Proteomics;Mouradian;Curren. Opin. in Chem. Bio.,2002

3. Resolution Limits of Optical Lithography;Okazaki;J. Vac. Sci. Technol. B,1991

4. Semiconductor Lithography

5. Nanolithography and its Prospects as a Manufacturing Technology;Pwase;J. Vac. Sci. Technol. B,1992

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1. Fabrication of micro/submicron hierarchical structures on ceramic sheet surfaces combining 2-step imprinting and in-plane compression processes;Japanese Journal of Applied Physics;2024-03-01

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