Hot Embossing: An Alternative Method to Produce Cavities in Ceramic Multilayer

Author:

Rabe Torsten,Kuchenbecker Petra,Schulz Baerbel,Schmidt Martin

Publisher

Wiley

Subject

Materials Chemistry,Marketing,Condensed Matter Physics,Ceramics and Composites

Reference13 articles.

1. Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)

2. 2. G. Ostromecki, T. Zawada, and L. J. Golonka , "Fluidic Micromixer Made in LTCC Technology-Preliminary Results ," 28th International Spring Seminar on Electronics Technology, Proceedings, 2005, 352-357.

3. 3. W. Scheel , "Optoelectronic Packaging-Einfuhrung zum Thema ," Syst. Integration in Micro Electronics, Proceedings, 2002, 11-21.

4. 4. Y. Imanaka , Multilayered Low Temperature Cofired Ceramics (LTCC) Technology , Springer, New York, 142 -143 , 2005 , ISBN 0-387-23130-7.

5. Laser treatment of LTCC for 3D structures and elements fabrication

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