Periodic density fluctuations in sputtered aluminum‐doped silicon oxynitride layers-Reference-Cited by-同舟云学术

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Periodic density fluctuations in sputtered aluminum‐doped silicon oxynitride layers

Published:2019-09-06 Issue:1 Volume:11 Page:207-214
ISSN:2041-1286
Container-title:International Journal of Applied Glass Science
language:en
Short-container-title:Int J Appl Glass Sci

Author:

Roch Tomáš¹^ORCID,Šimurka Lukáš²^ORCID,Ow‐Yang Cleva W.³⁴^ORCID,Sezen Meltem³,Satrapinskyy Leonid¹,Turutoğlu Tuncay²

Affiliation:

1. Department of Experimental Physics Faculty of Mathematics, Physics and Informatics Comenius University in Bratislava Bratislava Slovak Republic

2. ŞİŞECAM Science, Technology and Design Center Gebze - Kocaeli Turkey

3. Nanotechnology Research and Application Center (SUNUM), Sabanci University Tuzla, Istanbul Turkey

4. Materials Science and Nano‐Engineering ProgramSabanci University Tuzla, Istanbul Turkey

Funder

European Regional Development Fund

Publisher

Wiley

Subject

General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1111/ijag.13616

Reference31 articles.

1. Mechanical properties of sputtered silicon oxynitride films by nanoindentation

2. Refractive index of sputtered silicon oxynitride layers for antireflection coating

3. Stable deposition of silicon oxynitride thin films with intermediate refractive indices by reactive sputtering

4. AndersonC NadaudN.Transparent substrate with an antireflection low‐emissivity or solar‐protection coating. United States patent 7 005 188 B2.2006.

5. PolcynA WagnerA BuhayH BhandariA FinleyJJ OhodnickiPR et al.Solar control coatings with discontinuous metal layer. United States patent 2018/0148371 A1.2018.

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