Using Simultaneous Deposition and Rapid Growth to Produce Nanostructured Composite Films of AIN/TiN by Chemical Vapor Deposition
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1996.tb08594.x/fullpdf
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