The SiO2-Si3N4 Interface, Part I: Nature of the Interphase
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1995.tb08481.x/fullpdf
Reference32 articles.
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2. Infrared Optical Properties of Silicon Oxynitride Films: Experimental Data and Theoretical Interpretation;Eriksson;J. Appl. Phys.,1986
3. Chemical and Structural Order in Silicon Oxynitride by Methods of Surface Physics;Finster;Prog. Surf. Sri.,1991
4. Thermochemical Nitridation of Microporous Silica Films in Ammonia;Brow;J. Am. Ceram. Soc.,1987
5. Thermal Oxidation in Wet Oxygen of Reactive Ion-Beam Sputter-Deposited Silicon Nitride Films;Fourrier;J. Electrochem. Soc.,1991
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