Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β-Ta2O5-Reference-Cited by-同舟云学术

Effects of Temperature and Reagent Concentration on the Morphology of Chemically Vapor Deposited β-Ta2O5

Published:1995-05 Issue:5 Volume:78 Page:1297-1300
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:

Author:

Bae Yong W.,Lee Woo Y.,Stinton David P.

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1995.tb08485.x/fullpdf

Reference11 articles.

1. Corrosion of Silicon-Based Ceramics in Combustion Environments;Jacobson;J. Am. Ceram. Soc.,1993

2. W. Y. Lee Y. W. Bae D. P. Stinton T. E. Strangman Na 2 SO 4 Induced Corrosion of Si 3 N 4 Coated with Chemically Vapor Deposited Ta 2 O 5 submitted to J. Am. Ceram. Soc

3. Ellipsometric Examination of Growth and Dissolution Rates of Ta2O5 Films Formed by Metalorganic Chemical Vapor Deposition;An;J. Electrochem. Soc.,1992

4. Preparation and Properties of Ta2O5 Films by LPCVD for ULSI Application;Zaima;J. Electrochem. Soc.,1990

5. Chemical Vapor Deposition of Tantalum Pentoxide Films for Metal-Insulator-Semiconductor Devices;Kaplan;J. Electrochem. Soc.,1976

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